выставка " Экология 2002 "  Киев 22 - 25 мая

Photoluminescence of inhomogeneous porous silicon at gas adsorptio

2. Experimental

The porous layers were prepared on phosphorus doped, (100) oriented silicon substrates of 4.5 W.cm resistivity and 350 mm thickness. The growing of the porous layers was provided by the anodization in the solution of 48 w.%HF: C2H6O (1:2) with two regimes: at the constant current density of 20 mA/cm2 for 15 min and at discrete subsequence steps of the current, namely, 40, 32, 24, 16 and 8 mA/cm2 for 3 min of each current value. The selected technological regimes allow to form the material with the porosity within 60 - 70 % [16]. The rate of PS layer growth is about 6-10 nm per second. In this case, the thickness of each layers formed by the second regime is estimated to be equal 1.1-1.8 mm. The PL of PS has been excited by the DRSh-250-2 mercury lamp through the system of the optical filters with a singular selected emission at 365, 405, 436, 546 or 578 nm. The PL spectra of the as-prepared PS films were measured in transient and steady-state modes in two atmospheres- ambient air and saturated acetone vapours. The steady state mode is achieved by the stabilization of the PL intensity when the patterns are excited by 405 nm for 30 min, then by 436 nm for 5 min and 546 nm for 5 min. Such a treatment evokes the 1.8 time reduction of the PL yield for 10 min and then PL exhibits no change during measurement neither in ambient atmosphere nor in acetone vapours.

abstract
1. Introduction
2. Experimental
3. PL of multilayer PS film: simulation
4. PL of the inhomogeneous PS film: Influence of The acetone adsorption
5. Conclusions

Captures for the figures
References

V.A.Skryshevsky

Radiophysics Department, Kiev Shevchenko University,
64 Vladimirskaya, 01033, Kiev, Ukraine, fax.+380-44-2656744,
e-mail: skrysh@uninet.kiev.ua

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